About the Facility
This certified class 10,000 (ISO-7) cleanroom spans over 4,000 sq. ft. area, including 2500 sq. ft. of workspace. The four functional sectors - etching, metrology, depositing, and lithography - are based on a bay-and-chase configured framework. This means that a service area surrounds individual bays. State-of-the-art equipment is allocated in the different sectors accordingly. A real-time monitoring system (for hazardous gases, airborne particle concentration, temperature, air pressure, etc.) ensures the cleanroom runs smoothly and safely.
Facility Contacts
Acknowledgement
Agencies, including the NSF and the University of Nebraska-Lincoln, providing partial support of our Nebraska Nanoscale Facilities and Nebraska Center for Materials and Nanoscience Facilities require that the following words be included at the end of any Acknowledgement section of a paper in which experimental work was done in NNF-NCMN facilities:
"The research was performed in part in the Nebraska Nanoscale Facility: National Nanotechnology Coordinated Infrastructure and the Nebraska Center for Materials and Nanoscience (and/or NERCF), which are supported by the National Science Foundation under Award ECCS: 2025298, and the Nebraska Research Initiative."