Charge Rates for NCMN Cleanroom Facility ($/hour) – 2024/2025
Instrument | Equipment - NCMN Faculty | Specialist - NCMN Faculty | Equipment - University Faculty | Specialist - University Faculty | Equipment - Industry | Specialist - Industry |
|---|---|---|---|---|---|---|
| EBL (ZEISS SUPRA 40) | 69.00 | 64.00 | 77.00 | 70.00 | 120.00 | 114.00 |
| Laser Writer (DWL-66) | 45.00 | 64.00 | 53.00 | 70.00 | 80.00 | 114.00 |
| RIE (Trion Phantom III) | 36.00 | 64.00 | 42.00 | 70.00 | 60.00 | 114.00 |
| Deep RIE (Oxford PlasmaPro 100) | 52.00 | 64.00 | 60.00 | 70.00 | 89.00 | 114.00 |
| Mask Aligner (MJB-4) | 28.00 | 64.00 | 31.00 | 70.00 | 45.00 | 114.00 |
| Miscellaneous Tools (F40, DekTak XT) | 27.00 | 64.00 | 30.00 | 70.00 | 45.00 | 114.00 |
| AJA E-Beam Evap | 13.00 | 64.00 | 17.00 | 70.00 | 25.00 | 114.00 |
| Ion Beam Milling/Sputtering (Intlvac Nanoquest I) | 32.00 | 64.00 | 37.00 | 70.00 | 48.00 | 114.00 |
| Ion Beam Milling/Sputtering (Intlvac Nanoquest I) PUMP DOWN | 0.75 | 64.00 | 1.00 | 70.00 | 2.00 | 114.00 |
| Spin Coater | 5.00 | 64.00 | 6.00 | 70.00 | 8.00 | 114.00 |
| Access Fee/Cleanroom Equipment and Consumables (annual rate) | 200.00 | 200.00 | 200.00 |