Bruker Dektak-XT Stylus Surface Profiling System
The Dektak-XT stylus surface profiling system enables the critical nanometer-level film, step, and surface measurements with repeatability of under five angstroms (<5Å). Utilizing a unique direct-drive scan stage, the system can speed up sizeable 3-D surface profiling up to 40% scanning speeds. Bruker’s vision64 operation and analysis software provides extensive user-defined capabilities for fast and comprehensive data collection and analysis. Dektak-XT system can significantly help future advances in microelectronics, semiconductors, solar, high-brightness LED, medical science, and materials science.
Equipment Specification
- Highest vertical resolution: 1Å
- Max vertical range: 1mm
- Max wafe size: 200mm (8 inch)
- 3D surface profiling
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