Charge Rates for NCMN Cleanroom Facility ($/hour) – 2025/2026
Instrument | Equipment - NCMN Faculty | Specialist - NCMN Faculty | Equipment - University Faculty | Specialist - University Faculty | Equipment - Industry | Specialist - Industry |
|---|---|---|---|---|---|---|
| EBL (ZEISS SUPRA 40) | 73.00 | 67.00 | 80.00 | 72.00 | 125.00 | 118.00 |
| Laser Writer (DWL-66) | 47.00 | 67.00 | 55.00 | 72.00 | 85.00 | 118.00 |
| RIE (Trion Phantom III) | 38.00 | 67.00 | 44.00 | 72.00 | 65.00 | 118.00 |
| Deep RIE (Oxford PlasmaPro 100) | 56.00 | 67.00 | 62.00 | 72.00 | 93.00 | 118.00 |
| Mask Aligner (MJB-4) | 29.00 | 67.00 | 32.00 | 72.00 | 46.00 | 118.00 |
| Miscellaneous Tools (F40, DekTak XT) | 29.00 | 67.00 | 32.00 | 72.00 | 46.00 | 118.00 |
| AJA E-Beam Evap | 14.00 | 67.00 | 18.00 | 72.00 | 26.00 | 118.00 |
| Ion Beam Milling/Sputtering (Intlvac Nanoquest I) | 33.00 | 67.00 | 38.00 | 72.00 | 48.00 | 118.00 |
| Ion Beam Milling/Sputtering (Intlvac Nanoquest I) PUMP DOWN | 0.75 | 67.00 | 1.00 | 72.00 | 2.00 | 118.00 |
| DISCO DAD Dicer | 10.00 | 67.00 | 12.00 | 72.00 | 16.00 | 118.00 |
| Spin Coater | 5.00 | 67.00 | 6.00 | 72.00 | 8.00 | 118.00 |
| Access Fee/Cleanroom Equipment and Consumables (annual rate) | 200.00 | 200.00 | 300.00 |